Lithography machine
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Company name:Zinfo Consulting Services,lnc. |
Hot line:(703)2006590 |
Company fax:(703)4217736 |
Company Mobile: |
Company Address:Tianjin Huayuan,#2 Huatian Dao 4031 |
Website Service:
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Sussma6 lithography machine is a high resolution lithography system designed for laboratory development and small batch production. This lithography machine provides the best substrate adaptability and can hold wafers of different thickness and shape. The maximum diameter of the standard size substrate is 150 mm. The maximum thickness of the wafer can reach 6 mm. Suss ma6 provides a variety of contact exposure procedures. The accuracy of X-and Y-direction displacement is less than 0.1 μ M. The resolution of exposure wavelength is 0.8 μ m in vacuum mode using a 400 nm broadband light source. At the same time, we can choose different alignment devices, separate the top of the field of view or video microscope, and the bottom of BSA. It is the most commonly used and important lithography equipment in the laboratory.
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